S23 Energy Measurement
The SEMI S23 the “Guide for conservation of energy, utilities, and materials used by semiconductor manufacturing equipment” seeks continuous improvement for the energy efficiency of the semiconductor fabrication process. This involves the measurement of energy consumption, developing a road map for improvement, and then re-measurement to demonstrate that energy reduction has been obtained. The practical application of S23 energy consumption measurements requires both well-established technologies and newly emerging technologies. All, however, require skilled and experienced personnel for the successful execution of the measurement process. Salus Engineering International supports equipment manufacturers in both conducting measurements and identifying areas for potential energy reduction.
S23 Road Map Development
Energy Measurement is only part of the SEMI S23 process. It is intended to be use to demonstrate the effectiveness of the energy reduction roadmap. Salus Engineering International's experienced engineers also support S23 roadmap development. Identifying both short term and long term strategies for energy reduction is essential to continuous improvement. This takes into account the full complexities of the system engineering but it can result in significant reductions in energy consumption when done by knowledgeable engineers. Contact us for more information on how SEMI S23 applies to your organization.